Edwards offers a unique range of equipment, support services and technical expertise to meet application needs in the manufacture of microelectronics devices, including silicon and compound semiconductors. Edwards continues to innovate leading technology solutions to improve process uptime, yield, throughput and safety compliance whilst striving to balance the

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often conflicting requirements of:

· Lower cost of ownership through reduction in consumables usage (electrical power, fuel gas, nitrogen and cooling water),

· Reduced environmental emissions (noise, vibration, sub-fab particles, waste gas and waste water),

· Extended product lifetimes and reduction in on-going service costs.

Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, our systems are designed to meet the specific requirements of existing and developing processes. A variety of systems, such as dry vacuum pumps, turbomolecular pumps and point-of-use abatement systems are offered to optimise performance across the range of applications, from light duty to the heaviest duty processes.


Applications
•Load Lock•Transfer Chamber

•Metrology

•Lithography (& EUV Lithography)

•PVD Process

•PVD Pre-Clean

•Rapid Thermal Annealing

 •Strip/Ashing•Dielectric Etch (Oxide Etch)

•Silicon Conductor Etch

•Metal Conductor Etch

•PECVD and LPCVD

•Metal Organic CVD

•Atomic Layer Deposition

Semiconductor

semiconductor

Products:

Edwards handles the complete process exhaust management with vacuum pumps and abatement systems which use a wide range of technologies optimised for specific processes together with pipework, valving, traps, instrumentation, process tool interfaces and FabWorks communication networks. As well as process-specific product selection, system design and manufacture, Edwards provides sub-fab commissioning and 24/7 on-site service support.

Many of the products are supplied as process-specific variants or custom designs. These include complete tool pumping systems and fully integrated Zenith pumping and abatement systems. These more highly integrated sub-systems offer improved safety, reduced footprint, simplified installation and on-going service.

All these products and systems are compatible with Edwards FabWorks network system for condition monitoring, analysis and diagnostics. They also have built-in capability for standby running (Active Utility Control) to enable power and other utility cost reductions.

This range of products is also supplied into the flat panel display, solar, coating and other industrial applications.